As the Internet of Things becomes a reality, various sensor applications are becoming more and more widespread, such as smart cities, smart medical care, artificial intelligence, driverless, wearable devices, etc., and are used in various complex and extreme environments. Sensors used in these harsh environments will undoubtedly appear to be rusty, corroded, and damp, causing them to fail to work properly.
Parylene coating is resistant to acids, alkalis and organic solvents, and has excellent barriers to harsh environments such as water vapor and salt spray. At the same time, Parylene coating is very thin (a few microns or even hundreds of nanometers). The sensitivity of the sensor is very small, and it is currently used as the material of choice for various sensors.